Infrared studies of oxygen precipitation related defects in silicon after various thermal treatments

Solid State Phenomena

Volumn 47-48, Issue , 1996, Pages 229-234

  Vanhellemont, J ^a   Kissinger, G ^b   Clauws, P ^c   Kaniava, A ^a,d   Libezny, M ^a   Gaubas, E ^d   Simoen, E ^a   Richter, H ^b   Claeys, C ^a  

^a IMEC   (Belgium)

^b IHP   (Germany)

^c GHENT UNIVERSITY   (Belgium)

^d VILNIUS UNIVERSITY   (Lithuania)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER LIFETIME; LIGHT SCATTERING; OXYGEN; PRECIPITATION (CHEMICAL); SEMICONDUCTOR DEVICE MANUFACTURE; SILICON;

CARRIER LIFETIME MEASUREMENTS; INFRARED TECHNIQUE; INTERSTITIAL OXYGEN; LIGHT-INDUCED ABSORPTION; OXYGEN PRECIPITATES; OXYGEN PRECIPITATION; STRONG DEPENDENCES; THERMAL PRE-TREATMENT;

FOURIER TRANSFORM INFRARED SPECTROSCOPY;

EID: 17544372970     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Article

References (14)

1. H. Bender and J. Vanhellemont, "Oxygen in Silicon", in Handbook on Semiconductors, eds T.S Moss and S. Mahajan (Elsevier, New York, 1994), Vol. 3, pp. 1637-1753.
2. A. Borghesi, B. Pivac, A. Sassella and A. Stella, J. Appl. Phys. 77, 4169 (1995).
3. J. Vanhellemont, A. Kaniava, M. Libezny, E. Simoen and C. Claeys, J. Appl.Phys. 77, 56 (1995).
4. E. Simoen, G. Bosman, J. Vanhellemont and C. Claeys, Appl. Phys. Lett. 66, 2507 (1995).
5. A. Baghdadi, W. Bullis, M. Croarkin, Y-Z Li, R. Scace, R. Series, P. Stallhofer, M. Watana J. Electrochem. Soc. 136, 2015 (1989).
6. K. Moriya, "Observations of Defects in Crystals by Laser Tomography", Mitsui Mining & Smeing Co (Japan), (1989).
7. G. Kissinger, J. Vanhellemont, C. Claeys and H. Richter, J. Crystal Growth, in press (1995).
8. K. Tempelhoff, F. Spiegelberg, R. Gleichman and D. Wruck, phys. stat. sol. (a) 56, 213 (1997)
9. J. Vanhellemont, P. Clauws, M. Libezny, E. Simoen and C. Claeys, Proceedings of the 22nd International Conference on the Physics of Semiconductors, ed. D.J. Lockwood (World Scientifi Signapore), 2399 (1995).
10. E.C. Lightowlers and V. Higgs, phys.stat.sol. (a) 138, 665 (1993).
11. Y. Lelikov, Y. Rebane, S. Ruvimov, D. Tarhin, A. Sitnikova and Y. Shreter, Materials Science Forum Vol. 83-87, 1321 (1992).
12. J. Vanhellemont, A. Kaniava, M. Libezny, G. Kissinger, E. Simoen, C. Claeys and P. Clau presented at the MRS 1995 Spring Meeting, 17-21 April 1995, San Francisco Mat.Res.Soc.Symp.Proc., in press (1995).
13. M. Libezny, A. Kaniava, G. Kissinger, J. Nijs, C. Claeys and J. Vanhellemont, in "Analytic Techniques for Semiconductor Materials and Process Characterization II", to be published in Electrochem.Soc. Symp. Proc. (1995).
14. A. Kaniava, J. Vanhellemont, E. Gaubas and C. Claeys, to be published.