Elastic and plastic stress relaxation in stripes and circular mesas

Solid State Phenomena

Volumn 47-48, Issue , 1996, Pages 503-508

  Jain, S C ^a,d   Pinardi, K ^b,d   Harker, A H ^b   Richter, H ^c  

^a UNIVERSITY OF OXFORD   (United Kingdom)

^b RICARDO UK LTD   (United Kingdom)

^c IHP   (Germany)

^d IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; SEMICONDUCTOR DEVICE MANUFACTURE;

CALCULATED VALUES; CIRCULAR MESA; RAMAN MODES; STRAINED LAYERS;

STRESS RELAXATION;

EID: 17544372866     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Article

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