Deposition of undoped and doped textured diamond layers

Thin Solid Films

Volumn 377-378, Issue , 2000, Pages 188-192

  Bartsch, K ^a   Waidmann, S ^a   Arnold, B ^a   Oswald, S ^a   Schlafer D ^a   Leonhardt, A ^a   Summchen L ^b  

^a IFW DRESDEN   (Germany)

^b DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BORON; CHEMICAL VAPOR DEPOSITION; FILM GROWTH; IMPURITIES; NUCLEATION; PHOSPHORUS; SILICON; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

BIAS-ENHANCED NUCLEATION;

DIAMOND FILMS;

EID: 17444445576     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01275-X     Document Type: Article

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