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Volumn 120, Issue 1, 2005, Pages 110-114

Interferometric sensors for spectral imaging

Author keywords

Amorphous silicon; Fourier spectrometer; MEMS; Micro machining; Spectrometer; TCO; Thin film detector

Indexed keywords

AMORPHOUS SILICON; DETECTORS; IMAGING TECHNIQUES; INTERFEROMETERS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SPECTROMETERS; THIN FILM DEVICES;

EID: 17444393203     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.11.022     Document Type: Article
Times cited : (16)

References (5)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.