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Volumn 120, Issue 1, 2005, Pages 110-114
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Interferometric sensors for spectral imaging
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Author keywords
Amorphous silicon; Fourier spectrometer; MEMS; Micro machining; Spectrometer; TCO; Thin film detector
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Indexed keywords
AMORPHOUS SILICON;
DETECTORS;
IMAGING TECHNIQUES;
INTERFEROMETERS;
MICROELECTROMECHANICAL DEVICES;
MICROMACHINING;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
SPECTROMETERS;
THIN FILM DEVICES;
FOURIER SPECTROMETER;
STANDING WAVES;
THIN FILM DETECTORS;
TRANSPARENT CONDUCTIVE OXIDE (TCO);
OPTICAL SENSORS;
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EID: 17444393203
PISSN: 09244247
EISSN: None
Source Type: Journal
DOI: 10.1016/j.sna.2004.11.022 Document Type: Article |
Times cited : (16)
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References (5)
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