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Volumn 44, Issue 1-7, 2005, Pages
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Low-damage sputtering of GaAs and GaP using size-selected Ar cluster ion beams
a a a b b b |
Author keywords
CL; GaAs; GaP; GCIB; Irradiation damage depth; Low damage; Sputtering yield
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Indexed keywords
ARGON;
CATHODOLUMINESCENCE;
ELECTRON BEAMS;
ION BEAMS;
ION BOMBARDMENT;
MONOMERS;
SPUTTERING;
CATHODE LUMINESCENCE (CL);
GAS CLUSTER ION BEAM (GCIB);
IRRADIATION DAMAGE DEPTH;
LOW DAMAGE;
MONOMER ION BEAM (MIB);
SEMICONDUCTING GALLIUM ARSENIDE;
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EID: 17444371308
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/JJAP.44.L164 Document Type: Article |
Times cited : (12)
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References (8)
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