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Volumn 44, Issue 1-7, 2005, Pages

Low-damage sputtering of GaAs and GaP using size-selected Ar cluster ion beams

Author keywords

CL; GaAs; GaP; GCIB; Irradiation damage depth; Low damage; Sputtering yield

Indexed keywords

ARGON; CATHODOLUMINESCENCE; ELECTRON BEAMS; ION BEAMS; ION BOMBARDMENT; MONOMERS; SPUTTERING;

EID: 17444371308     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.44.L164     Document Type: Article
Times cited : (12)

References (8)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.