Colourtone lithography

Microelectronic Engineering

Volumn 61-62, Issue , 2002, Pages 105-111

  Lee, R A ^a  

^a CSIRO   (Australia)

Author keywords

Greytone lithography; Microstructure fabrication

Indexed keywords

FABRICATION; LITHOGRAPHY; MASKS; MICROSTRUCTURE; MIRRORS; THREE DIMENSIONAL COMPUTER GRAPHICS;

COLOURTONE LITHOGRAPHY;

MICROELECTRONICS;

EID: 17344386595     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)00520-8     Document Type: Conference Paper

References (8)

1. Fabrication of complex micro-optic components using photo-sculpturing through halftone transmission masks
2. Fabrication of microrelief surfaces using a one-step lithography process
3. Fabrication of microprisms for planar optical interconnections by use of analog gray-scale lithography with high-energy-beam-sensitive glass
4. The pixelgram - An application of electron beam lithography for the security printing industry
5. Microtechnology for anti-counterfeiting
6. An optical device and methods of manufacture
7. A new e-beam method for gray scale 3D optical elements