Continuously chirped gratings for DFB-lasers fabricated by direct write electron-beam lithography

Microelectronic Engineering

Volumn 61-62, Issue , 2002, Pages 331-335

  Steingruber R ^a   Mohrle M ^a   Sigmund, A ^a   Furst W ^a  

^a FRAUNHOFER HEINRICH HERTZ INSTITUTE   (Germany)

Author keywords

Chirped gratings; DFB lasers; Direct write electron beam lithography

Indexed keywords

DIFFRACTION GRATINGS; DISTRIBUTED FEEDBACK LASERS; FABRICATION; MICROELECTRONICS; NANOTECHNOLOGY; REFRACTIVE INDEX;

CHIRPED GRATINGS;

ELECTRON BEAM LITHOGRAPHY;

EID: 17344380377     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)00517-8     Document Type: Conference Paper

References (5)

1. Tunable DBR lasers with wide tuning range
2. Continuous-wave operation of sampled grating tunable lasers
3. High perfection chirped grating phase masks by electron-beam definition
4. Exposure and characterization of superstructure gratings for DBR lasers generated by direct write electron-beam lithography