Spectroscopic ellipsometry of carbon nanotube formation in SiC surface decomposition

Thin Solid Films

Volumn 455-456, Issue , 2004, Pages 339-343

  Matsumoto, K ^a,b   Maeda, H ^a   Kawaguchi, Y ^a   Takahashi, K ^a   Aoyama, M ^a   Yamaguchi, T ^a   Postava, K ^a  

^a SHIZUOKA UNIVERSITY   (Japan)

^b VSB TECHNICAL UNIVERSITY OF OSTRAVA   (Czech Republic)

Author keywords

Carbon nanotube; Silicon carbide; Spectroellipsometry; Surface decomposition

Indexed keywords

CARBON NANOTUBES; CHEMICAL VAPOR DEPOSITION; DECOMPOSITION; ELLIPSOMETRY; HEATING; OXIDATION; SUBSTRATES; SURFACE TREATMENT;

DIELECTRIC FUNCTIONS; NATURAL OXIDATION; SPECTROSCOPIC ELLIPSOMETRY; SURFACE DECOMPOSITION;

SILICON CARBIDE;

EID: 17144473853     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.11.200     Document Type: Conference Paper

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