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Volumn 455-456, Issue , 2004, Pages 313-317

Correlations between the microstructure of Ag-Si3N4 multilayers and their optical properties

Author keywords

Metallic nanoclusters; Non spherical shape; Optical properties; Spectroscopic ellipsometry; Surface plasmon resonance

Indexed keywords

ELLIPSOMETRY; MICROSTRUCTURE; MULTILAYERS; NANOSTRUCTURED MATERIALS; OPTICAL PROPERTIES; SPECTROSCOPIC ANALYSIS; SPUTTERING; SURFACE PLASMON RESONANCE; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

EID: 17144461102     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.01.080     Document Type: Conference Paper
Times cited : (13)

References (18)
  • 10
    • 0033362121 scopus 로고    scopus 로고
    • J.J. Dubowski, H. Helvajian, E.W. Kreutz, K. Sugioka (eds.) Laser Applications in Microelectronic and Optoelectronic Manufacturing IV
    • C.N. Afonso, J. Solis, R. Sema, J. Gonzalo, J.M. Ballesteros, J.C.G. De Sande in: J.J. Dubowski, H. Helvajian, E.W. Kreutz, K. Sugioka (eds.) Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, Proc SPIE 3618, (1999) 453-464.
    • (1999) Proc SPIE , vol.3618 , pp. 453-464
    • Afonso, C.N.1    Solis, J.2    Sema, R.3    Gonzalo, J.4    Ballesteros, J.M.5    De Sande, J.C.G.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.