MEMS on silicon for integrated optic metrology and communication systems

Microsystem Technologies

Volumn 9, Issue 5, 2003, Pages 308-315

  Muller J ^a  

^a HAMBURG UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; INTEGRATED OPTICS; LIGHT AMPLIFIERS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTICAL COMMUNICATION; PLASMA ETCHING; SEMICONDUCTOR DOPING; SUBSTRATES;

INTEGRATED OPTIC METROLOGY; MICROELECTROMECHANICAL STRUCTURES; SELF ALIGNED DETECTOR;

SILICON;

EID: 17144436271     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-002-0238-y     Document Type: Article

References (21)

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