Single-pulse femtosecond laser machining of glass

Journal of Optics A: Pure and Applied Optics

Volumn 7, Issue 4, 2005, Pages 162-168

  Campbell, S ^a   Dear, F C ^a   Hand, D P ^a   Reid, D T ^a  

^a HERIOT WATT UNIVERSITY   (United Kingdom)

Author keywords

Femtosecond machining; Laser ablation; Laser processing

Indexed keywords

AIR; ATOMIC FORCE MICROSCOPY; FUSED SILICA; HEAT AFFECTED ZONE; LASER ABLATION; LASER PULSES; MACHINING; NATURAL FREQUENCIES; OPTIMIZATION;

FEMTOSECOND MACHINING; LASER MACHINING; LASER PROCESSING; NANOSECOND LASERS; SINGLE-PULSE MACHINING;

GLASS;

EID: 17144373023     PISSN: 14644258     EISSN: None     Source Type: Journal    
DOI: 10.1088/1464-4258/7/4/002     Document Type: Article

References (15)

1. Ashkenasi D, Muller G, Rosenfeld A, Stoian R, Hertel I V, Bulgakova N M and Campbell E E B 2003 Fundamentals and advantages of ultrafast micro-structuring of transparent materials Appl. Phys. A 77 223-8
2. Pronko P P, Dutta S K, Squier J, Rudd J V, Du D and Mourou G 1995 Machining of sub-micron holes using a fs laser at 800 nm Opt. Commun. 114 106-10
3. Zoubir Z, Shah L, Richardson K and Richardson M 2003 Practical uses of fs laser micro-materials processing Appl. Phys. A. 77 311-5
4. Zhu X, Naumov A Yu, Villeneuve D M and Corkum P B 1999 Influence of laser parameters and material properties on micro drilling with fs laser pulses Appl. Phys. A 69S S367-71
5. Zhao J, Huettener B and Menschig A 2001 Microablation with ultrashort laser pulses Opt. Laser Technol 33 487-91
6. Stuart B C, Feit M D, Herman S, Rubenchik A M, Shore B W and Perry M D 1996 Optical ablation by high-power short-pulse lasers J. Opt. Soc. Am. B 13 459-68
7. Siegman A E 1986 Lasers (Mill Valley, CA: University Science Books)
8. Momma C, Nolte S, Kamlange G, von Alvensleben F and Tunnermann A 1998 Beam delivery of femtosecond laser radiation by diffractive optical elements Appl. Phys. A 67 517-20
9. Sun J and Longtin J P 1999 Novel beam delivery technique for ultrafast laser processing Thermal Sci. Eng. 7 81-5
10. Yariv A 1987 Quantum Electronics 3rd edn (New York: Wiley)
11. Nibbering E T J, Grillon G, Franco M A, Prade B S and Mysyrowicz A 1997 Determination of the inertial contribution to the nonlinear refractive index of air, N2, and O2 by use of unfocused high-intensity fs laser pulses J. Opt. Soc. Am. B 14 650-60
12. Korte F, Adams S, Egbert A, Fallnich C, Ostendorf A, Nolte S, Will M, Ruske J-P, Chichkov B N and Tunnermann A 2000 Sub-diffraction limited structuring of solid targets with fs laser pulses Opt. Express 741-9
13. Varel H, Ashkenasi D, Rosenfeld A, Wahmer M and Campbell E E B 1997 Micromachining of quartz with ultrashort laser pulses Appl. Phys. A 65 367-73
14. Shah L, Tawney J, Richardson M and Richardson K 2001 Fs laser deep hole drilling of silicate glasses in air Appl. Surf. Sci. 183 151-64
15. Ameer-Beg S, Perrie W, Rathbone S, Wright J, Weaver W and Champoux H 1998 Appl. Surf. Sci. 127-129 875-80