SCOPUS 정보 검색 플랫폼

Journal of Electroceramics

Volumn 13, Issue 1-3, 2004, Pages 423-428

Development of spin coated mesoporous oxide films for MEMS structures

(6) Paik, Jong Ah a Fan, Shih Kang b Chang, Hsin c Kim, Chang Jin b Wu, Ming C c Dunn, Bruce a

a Depts of Mat Sci and Engineering (United States)

b Mechanical Engineering Department (United States)

c UNIVERSITY OF CALIFORNIA (United States)

Author keywords

MEMS; Mesoporous oxide films; Spin coating; Surface micromachining

Indexed keywords

CALCINATION; DENSITY (SPECIFIC GRAVITY); ETCHING; HYDROPHOBICITY; MESOPOROUS MATERIALS; SPIN COATING; THERMAL INSULATING MATERIALS; THIN FILMS; TITANIUM DIOXIDE;

MEMS; MESOPOROUS OXIDE FILMS; RAPID ETCHING; SURFACE MICROMACHINING;

MICROELECTROMECHANICAL DEVICES;

EID: 17044440110 PISSN: 13853449 EISSN: None Source Type: Journal
DOI: 10.1007/s10832-004-5136-5 Document Type: Conference Paper

Times cited : (5)

References (14)

1
- 0026931265
- C.T. Kresge, M.E. Leonowicz, W.J. Roth, J.C. Vartuli, and J.S. Beck, Nature, 359, 710 (1992).
- (1992) Nature , vol.359 , pp. 710
- Kresge, C.T.¹ Leonowicz, M.E.² Roth, W.J.³ Vartuli, J.C.⁴ Beck, J.S.⁵

2
- 11844268820
- P. Yang, D. Zhao, D.I. Margolese, B.F. Chmelka, and G.D. Stucky, Chem. Mater., 11, 2813 (1999).
- (1999) Chem. Mater. , vol.11 , pp. 2813
- Yang, P.¹ Zhao, D.² Margolese, D.I.³ Chmelka, B.F.⁴ Stucky, G.D.⁵

3
- 0032479722
- H. Yang, G.A. Ozin, and C.T. Kresge, Adv. Mater., 10, 883 (1998).
- (1998) Adv. Mater. , vol.10 , pp. 883
- Yang, H.¹ Ozin, G.A.² Kresge, C.T.³

4
- 0032208977
- D. Zhao, P. Yang, N. Melosh, J. Feng, B.F. Chrnelka, and G.D. Stocky, Adv. Mater., 10, 1380 (1998).
- (1998) Adv. Mater. , vol.10 , pp. 1380
- Zhao, D.¹ Yang, P.² Melosh, N.³ Feng, J.⁴ Chrnelka, B.F.⁵ Stocky, G.D.⁶

5
- 0030881278
- Y. Lu, R. Ganguli, E.A. Drewien, M.T. Anderson, C. J. Brinker, W. Gong, Y. Guo, H. Soyez, B. Dunn, M.H. Huang, and J.I. Zink, Nature, 389, 364 (1997).
- (1997) Nature , vol.389 , pp. 364
- Lu, Y.¹ Ganguli, R.² Drewien, E.A.³ Anderson, M.T.⁴ Brinker, C.J.⁵ Gong, W.⁶ Guo, Y.⁷ Soyez, H.⁸ Dunn, B.⁹ Huang, M.H.¹⁰ Zink, J.I.¹¹

6
- 0034772803
- F. Schuth, Chem. Mater., 13, 3184 (2001).
- (2001) Chem. Mater. , vol.13 , pp. 3184
- Schuth, F.¹

7
- 0003532560
- Kluwer Academic Publishers, Boston
- S.D. Senturia, Microsystem Design (Kluwer Academic Publishers, Boston, 2001).
- (2001) Microsystem Design
- Senturia, S.D.¹

8
- 17044420250
- Special issue of MRS bulletin
- April, D. Bishop, A. Heuer and D. Williams guest editors
- See special issue of MRS Bulletin, April, 2001, Microelectromechanical Systems: Technology and Applications, D. Bishop, A. Heuer and D. Williams guest editors, p. 282.
- (2001) Microelectromechanical Systems: Technology and Applications , pp. 282

9
- 0036670397
- J-A. Paik, S-K. Fan, C-J. Kim, M. C. Wu, and B. Dunn, J. Mater. Res., 17, 2121 (2002).
- (2002) J. Mater. Res. , vol.17 , pp. 2121
- Paik, J.-A.¹ Fan, S.-K.² Kim, C.-J.³ Wu, M.C.⁴ Dunn, B.⁵

10
- 0030420887
- K.R. Williams and R.S. Muller, J. Microelectromechan. Syst., 5, 256 (1996).
- (1996) J. Microelectromechan. Syst. , vol.5 , pp. 256
- Williams, K.R.¹ Muller, R.S.²

11
- 0003108168
- edited by V.M. Nace (Marcel Dekker Inc., New York)
- B. Chu and Z. Zhou, in Nonionic Surfactants: Polyoxyalkylene Block Copolymers, edited by V.M. Nace (Marcel Dekker Inc., New York, 1996), p. 67.
- (1996) Nonionic Surfactants: Polyoxyalkylene Block Copolymers , pp. 67
- Chu, B.¹ Zhou, Z.²

12
- 17044385204
- J-A. Paik and B. Dunn, to be submitted
- J-A. Paik and B. Dunn, to be submitted.

13
- 0031801728
- D. Zhao, Q. Huo, J. Feng, B.F. Chmelka, and G.D. Stucky, J. Am. Chem. Soc., 120, 6024 (1998).
- (1998) J. Am. Chem. Soc. , vol.120 , pp. 6024
- Zhao, D.¹ Huo, Q.² Feng, J.³ Chmelka, B.F.⁴ Stucky, G.D.⁵

14
- 0000825148
- D.J. Suh and T.-J. Park, Chem. Mater., 9, 1903 (1997).
- (1997) Chem. Mater. , vol.9 , pp. 1903
- Suh, D.J.¹ Park, T.-J.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.