Design, simulation and fabrication of 3D self-collimation photonic crystals

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5595, Issue , 2004, Pages 45-53

  Prather, Dennis W ^a   Venkataraman, Sriram ^a   Shi, Shouyan ^a   Schneider, Garrett ^a   Murakowski, Janusz ^a  

^a UNIVERSITY OF DELAWARE   (United States)

Author keywords

DRIE; MEMS; Self collimation; Silicon micromachining; Three dimensional photonic crystals

Indexed keywords

DRIE; SELF-COLLIMATION; SILICON MICROMACHINING; THREE-DIMENSIONAL PHOTONIC CRYSTALS;

ANISOTROPY; COMPUTER SIMULATION; CRYSTAL LATTICES; ETCHING; LIGHT POLARIZATION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTICAL WAVEGUIDES; PHOTONS; SILICON;

CRYSTALS;

EID: 17044438333     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.580857     Document Type: Conference Paper

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