Molecular dynamics simulation on the mechanism of nanometric machining of single-crystal silicon

Materials Science Forum

Volumn 471-472, Issue , 2004, Pages 144-148

  Wu, H ^a   Lin, B ^a   Yu, S Y ^a   Zhu, H T ^a  

^a TIANJIN UNIVERSITY   (China)

Author keywords

Hydrostatic pressure; Molecular dynamics; Nanometric cutting; Silicon; Simulation

Indexed keywords

COMPUTER SIMULATION; CUTTING; DEFORMATION; DISLOCATIONS (CRYSTALS); ELASTICITY; HYDROSTATIC PRESSURE; MACHINING; MOLECULAR DYNAMICS; SINGLE CRYSTALS;

ELASTIC DEFORMATION; NANOMETRIC CUTTING; NANOMETRIC MACHINING; SURFACE CONTAMINATION;

SILICON;

EID: 17044428098     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.471-472.144     Document Type: Conference Paper

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