Integration of metal-oxide nanobelts with microsystems for sensor applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5593, Issue , 2004, Pages 144-151

  Yu, Choongho ^a   Hao, Qing ^a   Shi, Li ^a   Kong, Xiangyang ^b   Wang, Z L ^b  

^a The University of Texas at Austin   (United States)

^b Georgia Institute of Technology   (United States)

Author keywords

Dielectrophoresis; Ethanol; Gas sensors; Integration; Metal oxide; Microsystems; Nanobelt; Nanosensors; NO 2; Poisoning

Indexed keywords

DIELECTROPHORESIS; METAL OXIDES; MICROSYSTEMS; NANOBELT; NANOSENSORS; NO2; POISONING;

CRYSTALLINE MATERIALS; ETHANOL; INTEGRATION; MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; NITROGEN COMPOUNDS; SINGLE CRYSTALS; TIN COMPOUNDS;

CHEMICAL SENSORS;

EID: 17044425693     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.570971     Document Type: Conference Paper

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