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Volumn 52, Issue 3, 2005, Pages 503-506

Surface acoustic wave properties of proton-exchanged LiNbO3 waveguides with SiO2 film

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ELECTRODES; LITHIUM NIOBATE; PARAMETER ESTIMATION; SECONDARY ION MASS SPECTROMETRY; SILICA; THERMODYNAMIC STABILITY; THIN FILMS; TRANSDUCERS;

EID: 17044416078     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2005.1417274     Document Type: Article
Times cited : (3)

References (23)
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  • 15
    • 0000575253 scopus 로고    scopus 로고
    • Electromechanical coupling coefficient for surface acoustic waves in proton-exchanged 128-degrees-rotated Y-cut lithium niobate
    • D. Ciplys and R. Rimeika, "Electromechanical coupling coefficient for surface acoustic waves in proton-exchanged 128-degrees-rotated Y-cut lithium niobate," Appl. Phys. Lett., vol. 73, pp. 2417-2419, 1998.
    • (1998) Appl. Phys. Lett. , vol.73 , pp. 2417-2419
    • Ciplys, D.1    Rimeika, R.2
  • 16
    • 0030107792 scopus 로고    scopus 로고
    • 3 waveguides fabricated by proton exchange using octanoic acid
    • 3 waveguides fabricated by proton exchange using octanoic acid," J. Phys. D: Appl. Phys., vol. 29, pp. 589-592, 1996.
    • (1996) J. Phys. D: Appl. Phys. , vol.29 , pp. 589-592
    • Cheng, C.C.1    Chen, Y.C.2    Wang, S.T.3
  • 23
    • 0031546206 scopus 로고    scopus 로고
    • Reactive magnetron sputtering of silicon to produce silicon oxide
    • R. P. Howson, N. Danson, and G. W. Hall, "Reactive magnetron sputtering of silicon to produce silicon oxide," Nucl. Instrum. Methods Phys. Res. B, vol. 121, pp. 90-95, 1997.
    • (1997) Nucl. Instrum. Methods Phys. Res. B , vol.121 , pp. 90-95
    • Howson, R.P.1    Danson, N.2    Hall, G.W.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.