Nonlinear diffusion process modeling using response surface methodology and variable transformation

Robotics and Computer-Integrated Manufacturing

Volumn 20, Issue 2, 2004, Pages 121-125

  Ko, Young Don ^a   Kim, Yuhee ^a   Park, Dongkwon ^b   Yun, Ilgu ^a  

^a Yonsei University   (South Korea)

^b Yonsei University Wonju   (South Korea)

Author keywords

D optimal design; Process modeling; Response surface methodology; Variable transformation

Indexed keywords

DATA REDUCTION; DIFFUSION; ETCHING; FABRICATION; MATHEMATICAL MODELS; MATRIX ALGEBRA; NONLINEAR SYSTEMS; PROCESS ENGINEERING; SEMICONDUCTOR DEVICE MANUFACTURE; STATISTICAL METHODS; SURFACE PROPERTIES;

D-OPTIMAL DESIGN; PROCESS MODELING; RESPONSE SURFACE METHODOLOGY; VARIABLE TRANSFORMATION;

COMPUTER INTEGRATED MANUFACTURING;

EID: 1642634489     PISSN: 07365845     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.rcim.2003.10.002     Document Type: Article

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