Fabrication of Substrate-Independent Hybrid Distributed Bragg Reflectors Using Metallic Wafer Bonding

IEEE Photonics Technology Letters

Volumn 16, Issue 3, 2004, Pages 837-839

  Lin, H C ^a   Cheng, K Y ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Distributed Bragg reflector (DBR); Heterogeneous integration; Metallic wafer bonding; Vertical cavity surface emitting lasers (VCSELs)

Indexed keywords

CRYSTAL GROWTH; CURRENT DENSITY; ELECTRON BEAMS; EPITAXIAL GROWTH; EVAPORATION; EVAPORATORS; FIBER BRAGG GRATINGS; METHANOL; OPTIMIZATION; PHOTOMETERS; REFRACTIVE INDEX; SEMICONDUCTOR MATERIALS;

DISTRIBUTED BRAGG REFLECTOR (DBR); HETEROGENEOUS INTEGRATION; METALLIC WAFER BONDING; VERTICAL-CAVITY SURFACE-EMITING LASERS (VCSEL);

MIRRORS;

EID: 1642633837     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2004.823735     Document Type: Article

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