Fabrication of Multimode Polymeric Waveguides and Micromirrors Using Deep X-Ray Lithography

IEEE Photonics Technology Letters

Volumn 16, Issue 3, 2004, Pages 798-800

  Kim, Joon Sung ^a   Kim, Jang Joo ^b  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

^b Seoul National University   (South Korea)

Author keywords

Micromirror; Optical interconnects; Polymeric multimode waveguide; X ray lithography

Indexed keywords

CLADDING (COATING); ELASTOMERS; FABRICATION; LIGHT PROPAGATION; LITHOGRAPHY; MIRRORS; OPTICAL INTERCONNECTS; SILICON; X RAYS;

MICROMIRRORS; POLYMERIC MULTIMODE WAVEGUIDE; X-RAY LITHOGRAPHY;

OPTICAL WAVEGUIDES;

EID: 1642618385     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2004.823694     Document Type: Article

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