Growth, microstructure, and microhardness of W/Mo nanostructured multilayers

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 1, 2001, Pages 94-97

  Geyang, Li ^a   Junhua, Xu ^a   Liuqiang, Zhang ^a   Liang, Wu ^a   Mingyuan, Gu ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL GROWTH; CRYSTAL MICROSTRUCTURE; HIGH RESOLUTION ELECTRON MICROSCOPY; LATTICE CONSTANTS; MAGNETRON SPUTTERING; MICROHARDNESS; MOLYBDENUM ALLOYS; MULTILAYERS; POLYCRYSTALLINE MATERIALS; SUBSTRATES; TUNGSTEN ALLOYS; X RAY DIFFRACTION;

NANOSTRUCTURED MULTILAYERS;

NANOSTRUCTURED MATERIALS;

EID: 1642542374     PISSN: 0734211X     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1335677     Document Type: Article

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