Analysis of the reflectivity of Mo/Si multilayer film for soft X-Ray

Guangxue Xuebao/Acta Optica Sinica

Volumn 23, Issue 11, 2003, Pages 1362-1365

  Wang, Hongchang ^a   Wang, Zhanshan ^a   Qin, Shuji ^a   Li, Fosheng ^a   Chen, Lingyan ^a   Zhu, Jie ^b   Cui, Mingqi ^b  

^a TONGJI UNIVERSITY   (China)

^b INSTITUTE OF HIGH ENERGY PHYSICS   (China)

Author keywords

Film optics; Fitting; Interface imperfection; Multilayer film; Parameter estimation; Soft X ray

Indexed keywords

CURVE FITTING; DEFECTS; INTERFACES (MATERIALS); LIGHT REFLECTION; MATHEMATICAL MODELS; PARAMETER ESTIMATION; SURFACE ROUGHNESS; X RAYS;

FILM OPTICS; INTERFACE IMPERFECTION; MULTILAYER FILM; SOFT X RAY;

OPTICAL MULTILAYERS;

EID: 1642354234     PISSN: 02532239     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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