Determination of adhesion energy of CNx thin film on silicon from micro-scratch testing

Tribology Transactions

Volumn 47, Issue 1, 2004, Pages 130-137

  Liu, Zhioiang ^a   Sun, Jian ^a   Wu, Jia Da ^b   Wang, Pei Nan ^b   Shen, Weidian ^a  

^a EASTERN MICHIGAN UNIVERSITY   (United States)

^b FUDAN UNIVERSITY   (China)

Author keywords

Adhesion energy; CNx film silicon; Micro scratch test

Indexed keywords

ADHESION; DEFORMATION; FRICTION; MATHEMATICAL MODELS; SILICON;

ADHESION ENERGY; FRICTION COEFFICIENTS;

THIN FILMS;

ADHESION; COATING; FILM THICKNESS; SILICON; TESTING METHOD; WEAR RESISTANCE;

EID: 1642340000     PISSN: 10402004     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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