Influence of particle oxide coating on light scattering by submicron metal particles on silicon wafers

Applied Physics Letters

Volumn 84, Issue 8, 2004, Pages 1278-1280

  Kim, Jung Hyeun ^a,c   Ehrman, Sheryl H ^a   Germer, Thomas A ^b  

^a UNIVERSITY OF MARYLAND   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^c UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COATED PARTICLES; ELECTROSTATIC PRECIPITATION; MONODISPERSITY;

COATINGS; COPPER; LIGHT POLARIZATION; LIGHT SCATTERING; NUCLEATION; OXIDATION; POLYSTYRENES; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

SILICON WAFERS;

EID: 1642319479     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1650555     Document Type: Article

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