Laser wavelength and partial pressure effects on the formation of nanocrystalline Si

Materials Science and Engineering: B

Volumn 101, Issue 1-3, 2003, Pages 146-149

  Kim, Jong Hoon ^a   Jeon, Kyung Ah ^a   Choi, Jin Baek ^a   Lee, Sang Yeol ^a  

^a Yonsei University   (South Korea)

Author keywords

Luminescence; Pulsed laser deposition; Quantum confinement effect; Si nanocrystallites

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; ENERGY GAP; NANOSTRUCTURED MATERIALS; NEODYMIUM LASERS; PARTIAL PRESSURE; PHOTOLUMINESCENCE; PULSED LASER DEPOSITION; QUANTUM THEORY; SCANNING ELECTRON MICROSCOPY; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

QUANTUM CONFINEMENT EFFECT; SI NANOCRYSTALLITES;

SILICON;

EID: 1642275283     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(02)00686-4     Document Type: Conference Paper

References (11)

1. Liao L.-S., Bao X.-M., Zheng X.-Q., Li N.-S., Min N.-B. Appl. Phys. Lett. 68:1996;850.
2. Toyama T., Kotani Y., Okamoto H., Kida H. Appl. Phys. Lett. 72:1998;1489.
3. Zacharias M., Heitmann J., Scholz R., Kahler U. Appl. Phys. Lett. 80:2002;661.
4. Ledoux G., Gong J., Huisken F. Appl. Phys. Lett. 79:2001;4028.
5. Werwa E., Seraphin A.A., Chiu L.A., Zhou C., Kolenbrander K.D. Appl. Phys. Lett. 64:1994;1821.
6. Yoshida T., Takeyama S., Yamada Y., Mutoh K. Appl. Phys. Lett. 68:1996;1772.
7. Makimura T., Kunii Y., Murakami K. Jpn. J. Appl. Phys. 35:1996;780.
8. Kim J.H., Jeon K.A., Shim E.S., Lee S.Y. Mater. Sci. Eng. B. 89:2002;70.
9. Jeong Y.S., Lee S.Y., Jang H.K., Yang I.S., Moon S.H., Oh B.D. Appl. Surf. Sci. 109:1997;424.
10. Cheylan S., Langford N., Elliman R.G. Nucl. Instrum. Meth. Phys. Res. B. 166-167:2000;851.
11. Chrisey D.B., Hubler G.K. Pulsed Laser Deposition of Thin Films. 1994;229-254 Wiley, New York.