Analytical modeling and quantitative analysis of scratch drive actuator

Proceedings - 2004 International Conference on MEMS, NANO and Smart Systems, ICMENS 2004

Volumn , Issue , 2004, Pages 629-635

  Zu, Jean W ^a   Qu, Qiuzhen ^a   Cheng, Gong ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

DESIGN PARAMETERS; DRIVING VOLTAGE; LONG RANGE FORCES; WORKING VOLTAGE;

BOUNDARY CONDITIONS; CAPACITORS; ELECTRIC INSULATORS; ELECTRIC POTENTIAL; GEOMETRY; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; PARAMETER ESTIMATION;

ACTUATORS;

EID: 16244414905     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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