Fabrications of micro-channel device by hot emboss and direct bonding of PMMA

Proceedings - 2004 International Conference on MEMS, NANO and Smart Systems, ICMENS 2004

Volumn , Issue , 2004, Pages 26-29

  Mizuno, J ^a   Harada, T ^a   Glinsner, T ^b   Ishizuka, M ^a   Edura, T ^a   Tsutsui, K ^a   Ishida, H ^c   Shoji, S ^a   Wada, Y ^a  

^a WASEDA UNIVERSITY   (Japan)

^b EV GROUP   (Austria)

^c 1F Kasho Bldg   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESIVES; BOND STRENGTH (CHEMICAL); BONDING; LIGHT ABSORPTION; MICROELECTROMECHANICAL DEVICES; SURFACE TENSION; ULTRASONIC CLEANING; WATER;

BONDED INTERFACE; EMBOSSING; MICRO-CHANNEL DEVICES;

POLYMETHYL METHACRYLATES;

EID: 16244384619     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)

1. Nils Roos, Thomas Luxbacher, Thomas Glinsner, Karl Pfeiffer, Hubert Schulz, Hella-C.Scheer, "Nanoimprint Lithograhy with a Commercial 4 Inch Bond System for Hot Embossing", SPIE'S Microlithography, Feb.2001,Santana