Measuring optical constants from the UV to X-ray wavelengths; how it was (and is) done

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5538, Issue , 2004, Pages 1-16

  Hunter, William R ^a  

^a SFA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION INDEX; OPTICAL CONSTANTS; PLASMON OSCILLATIONS; SPECTRAL RANGE;

ABSORPTION; ELECTRONIC PROPERTIES; ELLIPSOMETRY; MIRRORS; OPTICAL INSTRUMENTS; OSCILLATIONS; PERMITTIVITY; REFRACTIVE INDEX; TRANSMITTERS; X RAYS;

ULTRAVIOLET RADIATION;

EID: 15844385982     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.558709     Document Type: Conference Paper

References (41)

1. R. T. Holm, "Convention Confusions", in Handbook of Optical Constants of Solids II, Ed. E. Palik, 21-55, Academic Press, New York (1991).
2. Rubens and Nichols, "Versuche mit Wärmestrahlen von grosser Wellenlänge", Ann d Physik, 60, 418-462 (1897), Rubens and Kurlbaum, "Anwendung der Methode der Reststrahlen zur Prüfung des Strahlungsgesetzes", Ann. d. Physik, 4, 649 (1901), Rubens and Hollnagel, "Measurements in the Extreme Infra-Red Spectrum" Phil. Mag., 19, 761 (1910)
3. Rubens and Nichols, "Versuche mit Wärmestrahlen von grosser Wellenlänge", Ann d Physik, 60, 418-462 (1897), Rubens and Kurlbaum, "Anwendung der Methode der Reststrahlen zur Prüfung des Strahlungsgesetzes", Ann. d. Physik, 4, 649 (1901), Rubens and Hollnagel, "Measurements in the Extreme Infra-Red Spectrum" Phil. Mag., 19, 761 (1910)
4. Rubens and Nichols, "Versuche mit Wärmestrahlen von grosser Wellenlänge", Ann d Physik, 60, 418-462 (1897), Rubens and Kurlbaum, "Anwendung der Methode der Reststrahlen zur Prüfung des Strahlungsgesetzes", Ann. d. Physik, 4, 649 (1901), Rubens and Hollnagel, "Measurements in the Extreme Infra-Red Spectrum" Phil. Mag., 19, 761 (1910)
5. Bode, H. W., Network Analysis and Feedback Amplifier Design, D. Van Nostrand Co., New York, 1945
6. I. Simon, "Spectroscopy in Infrared by Reflection and Its Use for Highly Absorbing Substances", J. Opt. Soc. Am., 41, 336-345 (1951)
7. F. C. Jahoda, "Fundamental Absorption of Barium Oxide from Its Reflectivity Spectrum", J. Opt. Soc. Am., 107, 1261-1265 (1957)
8. Berreman, D. W., "Kramers-Kronig Analysis of Reflectance Measured at Oblique Incidence", Appl. Opt., 6, 1519-1521 (1967)
9. H. J. Bowlden and J. K. Wilmshurst, "Evaluation of the One-Angle Reflection Technique for the Determination of Optical Constants", J. Opt. Soc. Am. 53, 1073-1078 (1963)
10. G. Andermann, A. Caron, and D. A. Dows, "Kramers-Kronig Dispersion Analysis of Infrared Reflectance Bands", J. Opt. Soc. Am. 55, 1210-1216 (1965)
11. H. W. Verleur, "Determination of Optical Constants from Reflectance or Transmittance Measurements on Bulk Crystals of Thin Films", J. Opt. Soc. Am. 58, 1356-1364 (1968)
12. J. Pflüger and J. Fink, "Determination of Optical Constants by High-Energy Electron-Energy-Loss Spectroscopy (EELS)" in Handbook of Optical Constants of Solids II, Ed. E. Palik, 293-311, Academic Press, New York (1991).
13. J. Daniels, C. v. Festenberg, H. Raether, and K. Zeppenfeld, in Springer Tracts in Modern Physics, Ed. G. Höhler, 54, 77-135 (1970)
14. R. Tousey, "On Calculating the Optical Constants from Reflection Coefficients", J. Opt. Soc. Am., 29, 235-239 (1939)
15. W. R. Hunter, "Errors in using the Reflectance vs Angle of Incidence Method for Measuring Optical Constants", J. Opt. Soc. Am., 55, 1197-1204 (1965)
16. J. T. Cox, G. Hass, J. B. Ramsey, and W. R. Hunter, "Reflectance and optical constants of evaporated osmium in the vacuum ultraviolet from 300 to 2000 Å", J. Opt. Soc. Am., 63, 435-438 (1973)
17. G. R. Field and E. Murphy, "Method of Using the Reflectance Ratios of Different Angles of Incidence for the Determination of Optical Constants", Appl. Opt., 10, 1402-1405 (1971)
18. S. P. F. Humphreys-Owen, "Comparison of reflection methods for measuring optical constants without polarimetric analysis", Proc. Phys. Soc. (London), 77, 949-957 (1961)
19. D. W. Juencker, "Digital Evaluation of the Complex Index of Refraction from Reflectance Data", J. Opt. Soc. Am., 55, 295-299 (1965)
20. W. R. Hunter, "Measurement of Optical Constants in the Vacuum Ultraviolet Region", in Handbook of Optical Constants of Solids, Ed. E. Palik, 69-88, Academic Press, New York, (1985)
21. M. A. Rumsh, A. P. Lukirski, and V. N. Shchemelev, "Photoeffect for Metallic Cathods in the Wavelength Region from 1.39 to 13.3 Å", translated in Soviet Physics-Doklady, 5, 1231-1233 (1961)
22. E. P. Savinov, A. P. Lukirski, and Yu. F. Shepelev, "The Problem of the External Photoeffect of Metal Photocathodes for Radiation of Wavelength 23.6-113 Å" translated in Soviet Physics-Solid State, 6, 2624-2630 (1965)
23. J. L. Stanford, R. N. Hamm, and E. T. Arakawa, "Effect of Photon Refraction on Angular Dependence of Photoelectric Yields in the Wavelength Region 300-1200 Å", J. Opt. Soc. Am., 56, 124 (1966)
24. S. V. Pepper, "Optical Analysis of Photoemission", J. Opt. Soc. Am., 60, 805-812 (1970)
25. W. E. Spicer, "Photoemissive, Photoconductive, and Optical Absorption Studies of Alkali-Antimony Compounds", Phys. Rev., 112, 114-122 (1958)
26. E. T. Arakawa, R. N. Hamm, and M. W. Williams, "Optical Properties and Electron-Attenuation Lengths from Photoelectric-yield Measurements" J. Opt. Soc. Am., 63, 1131-1134 (1973)
27. H.-G. Birken, C. Blessing, and C. Kunz, "Determination of Optical Constants from Angular-Dependent, Photoelectric-Yield Measurements", in Handbook of Optical Constants of Solids II, Ed. E. Palik, 279-292, Academic Press, New York, (1991)
28. W. R. Hunter, "Optical Constants of Metals in the Extreme Ultraviolet. I. A Modified Critical-Angle Technique for measuring the Index of Refraction of Metals in the Extreme Ultraviolet", J. Opt. Soc. Am., 54, 15-19 (1964)
29. R. G. Johnston, L. R. Canfield, and R. P. Madden, "Reflective Scattering from Substrates and Evaporated Films in the Far Ultraviolet", Appl. Opt., 6, 719-722 (1967)
30. U. S. Whang, R. N. Hamm, E. T. Arakawa, and M. W. Williams, "Slope method for determining extinction coefficients", J. Opt. Soc. Am., 63, 305-308 (1973)
31. W. R. Hunter, "The Preparation and Use of Unbacked Metal Films as Filters in the Extreme Ultraviolet", in Physics of Thin Films, Eds. G. Hass, M. H. Francombe, and R. W. Huffman, 7, 43-114, Academic Press, New York, (1973)
32. C. Kunz, DESY HASYLAB, Hamburg, Germany, private communication
33. 2-overcoated aluminum mirrors with highest reflectance in the vacuum ultraviolet:", Appl. Opt., 5, 45-50 (1966)
34. J. T. Cox, G. Hass, and J. E. Waylonis, "Further studies on LiF-overcoated aluminum mirrors with highest reflectance in the vacuum ultraviolet", Appl. Opt., 7, 1535-1539 (1968)
35. J. Barth, R. L. Johnson, and M. Cardona, "Spectroscopic Ellipsometry in the 6-35 eV Region", in Handbook of Optical Constants of Solids II, Ed. E. Palik, 213-246, Academic Press, New York, (1991).
36. N. Kandaka, M. Yuri, H. Fukutani, T. Koide, and T. Shidara, "Ellipsometrical determination of the optical constants of gold in the vacuum ultraviolet region" Rev. Sci. Instrum., 63, 1450-1453 (1992).
37. 2,3 edges", Phys. Rev. B, 49, 16 283-16 288 (1994-1).
38. B. Sae-Lao and R. Soufli, "Measurements of the refractive index of yttrium in the 50-1300 eV energy region", Appl. Opt., 41, 7309-7316 (2002).
39. N. Kihara, H. Nagata, N. Hakagiri, H. Fujisaki, and T. Miyahara, "Optical constants for coated films in the soft x-ray region", Rev. Sci. Instrum., 60, 2227-2230 (1989).
40. R. L. Blake, J. C. Davis, D. E. Graessle, T. H. Burbine, and E. M. Gullikson, "Optical constants and scattering factors from reflectivity measurements", in Resonant and anomalous x-ray scattering", Eds. G. Materlik, C. J. Sparks, and K. Fischer, 79-90, Elsevier Science BV, Amsterdam, (1994).
41. Yu. A. Uspenskii, J. F. Seely, N. L. Popov, A. V. Vinogradov, Yu. P. Pershin, and V. V. Kondratenko, "Efficient method for the determination of extreme-ultraviolet optical constants in reactive materials: application to scandium and titanium", J. Opt. Soc, Am. A., 21, 298-305 (2004).