메뉴 건너뛰기




Volumn 5528, Issue , 2004, Pages 305-315

Theoferometer for high accuracy optical alignment and metrology

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL ALIGNMENT; THEODOLITE; THEOFEROMETERS; VECTOR METROLOGY;

EID: 13444261210     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.559969     Document Type: Conference Paper
Times cited : (5)

References (9)
  • 1
    • 0012863366 scopus 로고
    • Twyman-green interferometer
    • D. Malacara, ed., John Wiley and Sons, New York
    • D. Malacara, "Twyman-Green Interferometer," Optical Shop Testing, D. Malacara, ed., pp. 51-94, John Wiley and Sons, New York, 1992
    • (1992) Optical Shop Testing , pp. 51-94
    • Malacara, D.1
  • 3
    • 0019927495 scopus 로고
    • Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry
    • M. Takeda, H. Ina, and S. Kobayashi, "Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry," J. Opt. Soc. Am. 72, pp. 156-160, 1981
    • (1981) J. Opt. Soc. Am. , vol.72 , pp. 156-160
    • Takeda, M.1    Ina, H.2    Kobayashi, S.3
  • 4
    • 0004161838 scopus 로고    scopus 로고
    • Chap. 12&13, Cambridge University Press, New York
    • Press et. al., Numerical Recipes in Fortran, Chap. 12&13, Cambridge University Press, New York, 1996
    • (1996) Numerical Recipes in Fortran
    • Press1
  • 5
    • 15744404162 scopus 로고    scopus 로고
    • Absolute measurement of tilts via fourier analysis of interferograms
    • Aug
    • R. Toland, "Absolute Measurement of Tilts via Fourier Analysis of Interferograms," SPIE Proceedings, Aug 2004
    • (2004) SPIE Proceedings
    • Toland, R.1
  • 6
    • 13444307828 scopus 로고    scopus 로고
    • Adjustment mechanisms
    • A. Ahmad, ed., CRC Press, New York
    • A. Ahmad, "Adjustment Mechanisms," Handbook of Optomechanical Engineering, A. Ahmad, ed., pp. 211-253, CRC Press, New York, 1997
    • (1997) Handbook of Optomechanical Engineering , pp. 211-253
    • Ahmad, A.1
  • 7
    • 0037509002 scopus 로고    scopus 로고
    • Absolute position encoders using pattern recognition
    • June
    • D. Leviton, "Absolute position encoders using pattern recognition," NASA Tech Briefs 24, p. 6a, June 2000
    • (2000) NASA Tech Briefs , vol.24
    • Leviton, D.1
  • 8
    • 0034543783 scopus 로고    scopus 로고
    • Recent advances and applications for NASA's new, ultra-high sensitivity, absolute, optical pattern recognition encoders
    • D. Leviton and M. Garza, "Recent advances and applications for NASA's new, ultra-high sensitivity, absolute, optical pattern recognition encoders," SPIE 4091, pp. 385-394, 2000
    • (2000) SPIE , vol.4091 , pp. 385-394
    • Leviton, D.1    Garza, M.2
  • 9
    • 0034513013 scopus 로고    scopus 로고
    • Image processing for new optical pattern recognition encoders
    • D. Leviton, "Image processing for new optical pattern recognition encoders," SPIE 4113, pp. 32-40, 2000
    • (2000) SPIE , vol.4113 , pp. 32-40
    • Leviton, D.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.