Scheduling setup operations for bottleneck facilities in semiconductor manufacturing

Robotics, Automation, Control and Manufacturing: Trends, Principles and Applications - Proceedings of the 5th Biannual World Automation Congress, WAC 2002, ISORA 2002, ISIAC 2002 and ISOMA 2002

Volumn 14, Issue , 2002, Pages 109-114

  Zaid, Duwayri ^a   Mollaghasemi, Mansooreh ^b   Nazzal, Dima ^c  

^a i2 Technologies   (United States)

^b UNIVERSITY OF CENTRAL FLORIDA   (United States)

^c Georgia Institute of Technology   (United States)

Author keywords

Bottleneck facilities; Scheduling heuristic; Semiconductor manufacturing

Indexed keywords

AGERE SYSTEMS; BOTTLENECK FACILITIES; COMMONLY USED; CYCLE TIME; DISPATCHING RULES; INVENTORY LEVELS; ION IMPLANTERS; MACHINE SETUP; MEAN CYCLE TIME; ORLANDO , FLORIDA; PRODUCTION CYCLE; SCHEDULING HEURISTIC; SCHEDULING HEURISTICS; SCHEDULING RULES; SEMICONDUCTOR FABS; SEMICONDUCTOR MANUFACTURING; SET-UP TIME; SIMULATION RESULT; STANDARD DEVIATION; VALID SIMULATION; WAFER PRODUCTION; WORK IN PROCESS;

COMPUTER SIMULATION; INDUSTRIAL RESEARCH; ROBOTICS; SCHEDULING; SILICON WAFERS; STAGES; STATISTICS;

QUALITY CONTROL;

EID: 15744400395     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. Johri, P.K. 1993. Practical Issues in Scheduling and Dispatching in Semiconductor Wafer Fabrication. Journal of Manufacturing Systems, Vol. 12, No. 6, pp. 474-485.
2. Kim, Y., Lee, Y., and Kim, J. 1998. A Simulation Study on Lot Release Control, Mask Scheduling and Batch Scheduling in Semiconductor Wafer Fabrication Facilities. Journal of Manufacturing Systems. Vol. 17, No. 2, pp. 107-117.
3. Li, S., Tang, T., and Collins, W. 1996. Minimum Inventory Variability Schedule With Application in Semiconductor Fabrication. IEEE Transaction on Semiconductor Manufacturing, Vol. 9, No.1, pp. 145-149.
4. Mittler, M., and Schoemig, A.K. 1999. Comparison of Dispatching Rules for Semiconductor Manufacturing Using Large Facility Models. Proceedings of the 1999 Winter Simulation Conference, pp. 709-713.
5. Montgomery, D.C. and Runger, G.C. 1994. Applied Statistics and Probability for Engineers. John Wiley & Sons, Inc.
6. Wein, L.M. 1998. Scheduling Semiconductor Wafer Fabrication. IEEE Transaction on Semiconductor Manufacturing. Vol. 1, No.3, pp. 115-130.