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Volumn 16, Issue 1, 2005, Pages 28-31

Deposition and properties of highly C-oriented ZnO thin films for SAW devices

Author keywords

Anneal; C oriented; RF magnetron sputtering; Surface acoustic wave (SAW) devices; ZnO thin films

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ANNEALING; ATOMIC FORCE MICROSCOPY; CRYSTAL ORIENTATION; ELECTRIC CONDUCTIVITY OF SOLIDS; MAGNETRON SPUTTERING; PIEZOELECTRIC MATERIALS; SEMICONDUCTING FILMS; SURFACE ROUGHNESS; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

EID: 15744398223     PISSN: 10050086     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (10)

References (6)
  • 1
    • 15744362405 scopus 로고    scopus 로고
    • Preparation of piezoelectric thin films on high-acoustic-velocity substrates and exploration of SAW devices fabrication, shanghai institute of metallurgy
    • Beijing: Chinese Academy of Sciences
    • LIU Yan-song. Preparation of piezoelectric thin films on high-acoustic-velocity substrates and exploration of SAW devices fabrication, shanghai institute of metallurgy[D]. Beijing: Chinese Academy of Sciences, 2000.
    • (2000)
    • Liu, Y.-S.1
  • 2
    • 0001459197 scopus 로고
    • The properties and applications of ZnO thin films
    • Frans C M. The properties and applications of ZnO thin films[J]. Am Ceram Sco bull, 1990, 69(12): 1959-1964.
    • (1990) Am Ceram Sco Bull , vol.69 , Issue.12 , pp. 1959-1964
    • Frans, C.M.1
  • 3
    • 0344685416 scopus 로고    scopus 로고
    • The effect of nitridation of the Si substrate on the ZnO film quality
    • Chinese source
    • WANG Xiao-hua, FAN Xiwu, LI Bing-sheng. The effect of nitridation of the Si substrate on the ZnO film quality[J]. Journal of Optoelectronics · Laser, 2003, 14(8): 783-786. (in Chinese)
    • (2003) Journal of Optoelectronics · Laser , vol.14 , Issue.8 , pp. 783-786
    • Wang, X.-H.1    Fan, X.2    Li, B.-S.3
  • 4
    • 3142738987 scopus 로고    scopus 로고
    • Preparation and property investigations of magnetron sputtered zinc oxide thin films
    • Chinese source
    • WANG Jing, ZHANG Xi-qing. Preparation and property investigations of magnetron sputtered zinc oxide thin films[J]. Journal of Optoelectronics · Laser, 2002, 13(11): 1116-1119. (in Chinese)
    • (2002) Journal of Optoelectronics · Laser , vol.13 , Issue.11 , pp. 1116-1119
    • Wang, J.1    Zhang, X.-Q.2
  • 5
    • 15744364777 scopus 로고    scopus 로고
    • Chinese source
  • 6
    • 0742319103 scopus 로고    scopus 로고
    • Influence of postdeposition annealing on crystallinity of zinc oxide films
    • LI Jian-guo, YE Zhi-zhen, HUANG Jing-yun. Influence of postdeposition annealing on crystallinity of zinc oxide films[J]. Chinese Journal of Semiconductors, 2003, 24(7): 729-736.
    • (2003) Chinese Journal of Semiconductors , vol.24 , Issue.7 , pp. 729-736
    • Li, J.-G.1    Ye, Z.-Z.2    Huang, J.-Y.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.