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Volumn 16, Issue 1, 2005, Pages 28-31
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Deposition and properties of highly C-oriented ZnO thin films for SAW devices
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Author keywords
Anneal; C oriented; RF magnetron sputtering; Surface acoustic wave (SAW) devices; ZnO thin films
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Indexed keywords
ACOUSTIC SURFACE WAVE DEVICES;
ANNEALING;
ATOMIC FORCE MICROSCOPY;
CRYSTAL ORIENTATION;
ELECTRIC CONDUCTIVITY OF SOLIDS;
MAGNETRON SPUTTERING;
PIEZOELECTRIC MATERIALS;
SEMICONDUCTING FILMS;
SURFACE ROUGHNESS;
THIN FILMS;
X RAY DIFFRACTION ANALYSIS;
C-ORIENTED ZNO THIN FILMS;
PIEZOELECTRIC FILMS;
RESISTIVITY;
SURFACE ACOUSTIC WAVE (SAW);
ZINC OXIDE;
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EID: 15744398223
PISSN: 10050086
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (10)
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References (6)
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