A robust and reliable stress-induced self-assembly mechanism for optical devices

2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Volumn , Issue , 2002, Pages 131-132

  Ho, Yi Ping ^a   Wu, Mingching ^a   Lin, Hung Yi ^a   Fang, Weileun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINING; MIRRORS; MOEMS; SURFACE MICROMACHINING;

ASSEMBLY MECHANISM; STRESS-INDUCED; STRESS-INDUCED BEAMS; SUPPORTING MECHANISMS; SURFACE MICROMACHINING PROCESS;

SELF ASSEMBLY;

EID: 15544377445     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2002.1031478     Document Type: Conference Paper

References (6)

1. V. A. Aksvuk, et.al, the Proceedings of SPIE Volume: 3680, 1999, pp. 984-993.
2. V. A. Aksvuk, et.al, the Proceedings of SPIE Volume: 4178, 2000, pp. 320-324.
3. V. A. Aksvuk, IEEE/LEOS Optical MEMS, 2001.
4. Y. -P. Ho, Master Thesis, National Tsing-Hua University, Taiwan, R.O.C., 2002.
5. M. B. Chon, et. al, the Proceedings of SPIE Volume: 3514, 1998, pp. 1-16.
6. D. C. Miller, et.al, Proceedings of the IEEE International Conference MEMS 2000, 2000, pp. 265-270.