Infrared diagnostics for the measurement of fluid and solid motion in micromachined devices

ASME International Mechanical Engineering Congress and Exposition, Proceedings

Volumn 2, Issue , 2001, Pages 3263-3270

  Breuer, Kenneth S ^a   Bird, James C ^a   Han, Gengxin ^a   Johan, K ^a   Westin, A ^a  

^a BROWN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE COUPLED DEVICES; IMAGE ANALYSIS; INFRARED RADIATION; LIGHT MEASUREMENT; MICROOPTICS; OPTICAL SYSTEMS; SILICON; VELOCITY MEASUREMENT;

MICRODEVICES; WAVELENGTHS;

MICROMACHINING;

EID: 1542516299     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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3. L Fléchette, SA Jacobson, KS Breuer, FE Ehrich, R Ghodssi, R Khanna, C-W Wong, X Zhang, MA Schmidt & AHEpstein. (2000). "Demonstration of a Microfabricated High-Speed Turbine Supported on Gas Bearings" Proceedings, IEEE Solid State Sensors and Actuators Workshop. Hilton Head SC.
4. D Freeman (2001) Measuring Motions in MEMS. Materials Research Soc. Bulletin. 26: 4:305-306.
5. G Han & KS Breuer. (2001). Infrared PIVfor Measurement of Fluid and Solid Motion in Micromachined Devices. Proceedings, PIV01. Gottingen, Germany.
6. CD Meinhart, ST Wereley & JG Santiago (1999) PIV measurements of a microchannel flow. Exp. in fluids 27: 414-419.
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9. JK Sveen (2000) MatPIV 1.4, Mechanics Division, Department of Mathematics, University of Oslo, Norway.
10. ST Wereley. (2000) Personal communication.