Numerical investigation of the effect of conjugate heat transfer on chemical vapor deposition for thin-film growth

Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao

Volumn 24, Issue 3, 2003, Pages 217-227

  Hung, Tzu Chen ^a   Wang, Shou Kong ^a   Pei, Bau Shei ^b   Tsai, Fengjee Peter ^c  

^a I SHOU UNIVERSITY   (Taiwan)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^c Cooltec Inc ^*  (United States)

Author keywords

Chemical vapor deposition; Conjugate heat transfer; PISO method; Thin film growth

Indexed keywords

CHEMICAL VAPOR DEPOSITION; HEAT TRANSFER;

CONJUGATE HEAT TRANSFER; PRESSURE IMPLICIT SPLITTING OPERATOR;

THIN FILMS;

EID: 1542504052     PISSN: 02579731     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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