Pt heater/sensor microarray for distributed fluidic cooling assessment

ASME International Mechanical Engineering Congress and Exposition, Proceedings

Volumn 2, Issue , 2001, Pages 3241-3247

  Yoon, Yong Kyu ^a   Allen, Mark G ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLUIDITY; HEAT SINKS; LASERS; MICROPROCESSOR CHIPS; SEMICONDUCTOR MATERIALS; SILICON; SUBSTRATES; THERMAL CONDUCTIVITY;

FLUIDIC COOLING ASSESSMENT; SENSOR MICROARRAYS;

SENSORS;

EID: 1542411493     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. st century," in Proc. IEEE/CPMT Electron. Packag. Technol Conf., 1997, pp. 29-33.
2. K. Azar, "Power Consumption and Generation in the Electronics Industry- A Perspective," Sixteenth IEEE SEMITHERM Symposium, pp201-212, 2000.
3. L. J. Massaggia, J. N. Walpole, Z. L. Liau, and R. J. Phillips, "MicroChannel heat sinks for two-dimensional high-power-density diode laser arrays," IEEE J. Quantum Electron., vol.25, pp.1988-1992, Sept. 1989.
4. O. Brand, D. S. Kercher, Jeong B. Lee, M. a Allen, and A. Glezer, "Microjet Cooling Devices For Thermal Management of Microelectronics Devices," IEEE Solid-State Sensor and Actuator Workshop, Open Poster, Hilton Head Island, South Carolina, June 7-11, 1998
5. A. Nishihara, S. Sasaki, Y. Ohsone, and T. Nakajima, "Distribution of Heat Transfer Coefficients from Small Surfaces Cooled with Submerged Jets of Fluorocarbon Liquid Determined by Inverse Analysis of Heat Conduction," IEEE trans. CPMT, Part A, vol. 20, No. 2, pp.167-173, June 1997.
6. J. Koo, L. Jiang, L. Zhang, P. Zhou, S. S. Banerjee, T. W. Kenny, J. G. Santiago, and K. E. Goodson, "Modeling of Two-Phase MicroChannel heat Sinks for VLSI Chips," in Proc. IEEE/MEMS Conf., 2001, pp422-426.
7. P. Ciureanu and S. Middelhoek (edited by), "Thin Film Sensitive Sensors, in Sensors Series-Chap.4. Thermoresistive Sensors", Institute of Physics publishing, Bristol, 1992.
8. D.A. Benson, D. Bowman, W. Filter, R. Mitchell, "Design and Characterization of Microscale Heater Structures for Test Die and Sensor Applications", IEEE InterSociety Conference on Thermal Phenomena, pp. 434-441, 1998.
9. th, Page(s): 387 -392, 1995