SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Separation and Purification Technology

Volumn 35, Issue 3, 2004, Pages 203-213

Recovery of perfluoroethane from chemical vapor deposition operations in the semiconductor industry

(5) Wijmans, J G a He, Z a Su, T T a Baker, R W a Pinnau, I a

a Membrane Technology & Research Inc (United States)

Author keywords

Gas separation; Global warming; Membranes; Perfluorocarbons

Indexed keywords

CHEMICAL VAPOR DEPOSITION; PLASMA APPLICATIONS; POLYMERIC MEMBRANES; SEMICONDUCTOR MATERIALS;

MEMBRANE VAPOR SEPARATION; PLASMA CLEANINGS;

ORGANIC COMPOUNDS;

CHEMICAL VAPOR DEPOSITION; GAS PERMEATION; GAS SEPARATION; MEMBRANE; PERFLUOROPOLYETHER;

EID: 1542379671 PISSN: 13835866 EISSN: None Source Type: Journal
DOI: 10.1016/S1383-5866(03)00142-4 Document Type: Article

Times cited : (8)

References (10)

1
- 0031235950
- 4
- September
- 4, Semicond. Int. (September 1997).
- (1997) Semicond. Int.
- Gompel, J.V.¹ Walling, T.²

2
- 1542311880
- 6 from a gas
- 29 September
- 6 from a gas, US Patent, 5, 814, 127 (29 September 1998) pp. 95-100.
- (1998) US Patent, 5, 814, 127 , pp. 95-100
- Li, Y.-E.¹

3
- 1542281770
- Process for recovering semiconductor industry cleaning compounds
- 14 July
- I. Pinnau, J.G. Wijmans, Z. He, S. Goakey, R.W. Baker, Process for recovering semiconductor industry cleaning compounds, US Patent 5, 779, 763 (14 July 1998).
- (1998) US Patent 5, 779, 763
- Pinnau, I.¹ Wijmans, J.G.² He, Z.³ Goakey, S.⁴ Baker, R.W.⁵

4
- 1542281768
- 4 March
- I. Chernyakov, T.H.-L. Hsiung, A. Schwarz, J.H.-J. Yang, US Patent 5, 730, 779, (4 March 1998).
- (1998) US Patent 5, 730, 779
- Chernyakov, I.¹ Hsiung, T.H.-L.² Schwarz, A.³ Yang, J.H.-J.⁴

5
- 1542311881
- Recovery and system for separation and recovery of perfluoro compound gases
- 28 July, 5, 858, 065 (12 January 1999); and 5, 919, 285 (6 July 1999)
- Y.-E. Li, J.E. Paganessi, D. Vassallo, G.N. Flemming, Recovery and system for separation and recovery of perfluoro compound gases, US Patents 5, 785, 741 (28 July 1998); 5, 858, 065 (12 January 1999); and 5, 919, 285 (6 July 1999).
- (1998) US Patents 5, 785, 741
- Li, Y.-E.¹ Paganessi, J.E.² Vassallo, D.³ Flemming, G.N.⁴

6
- 1542342032
- 6 from vent gases of an aluminum production cell
- 19 October
- 6 from vent gases of an aluminum production cell, US Patent 5, 968, 334 (19 October 1999).
- (1999) US Patent 5, 968, 334
- Li, Y.-E.¹

7
- 1542281771
- Process for recovering sulfur hexafluoride
- 1 December
- A. Anumakonda, R. Gaita, S. Yates, J. Zhon, Process for recovering sulfur hexafluoride, US Patent 5, 843, 208 (1 December 1998).
- (1998) US Patent 5, 843, 208
- Anumakonda, A.¹ Gaita, R.² Yates, S.³ Zhon, J.⁴

8
- 0001350337
- Membrane separation of organic vapors from gas streams
- D. R. Paul, and Y. P. Yampol'skii (Eds.), Boca Raton, FL: CRC Press
- Baker R.W. Wijmans J.G. Membrane separation of organic vapors from gas streams Paul D.R. Yampol'skii Y.P. Polymeric Gas Separation Membranes 1994 353 CRC Press Boca Raton, FL
- (1994) Polymeric Gas Separation Membranes , pp. 353
- Baker, R.W.¹ Wijmans, J.G.²

9
- 0033894447
- Gas sorption, diffusion, and permeation in poly(dimethylsiloxane)
- Merkel T.C. Bondar V.I. Nagai K. Freeman B.D. Pinnau I. Gas sorption, diffusion, and permeation in poly(dimethylsiloxane) J. Polym. Sci. Phys. 38 2000 415-434
- (2000) J. Polym. Sci. Phys. , vol.38 , pp. 415-434
- Merkel, T.C.¹ Bondar, V.I.² Nagai, K.³ Freeman, B.D.⁴ Pinnau, I.⁵

10
- 0002500729
- Membrane formation for gas separation processes
- D. R. Paul, and Y. P. Yampol'skii (Eds.), Boca Raton, FL: CRC Press
- Koros W.J. Pinnau I. Membrane formation for gas separation processes Paul D.R. Yampol'skii Y.P. Polymeric Gas Separation Membranes 1994 209-271 CRC Press Boca Raton, FL
- (1994) Polymeric Gas Separation Membranes , pp. 209-271
- Koros, W.J.¹ Pinnau, I.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.