Relative Humidity Sensors Based on Porous Polysilicon and Porous Silicon Carbide

Proceedings of IEEE Sensors

Volumn 1, Issue 1, 2002, Pages 499-502

  Connolly, E J ^a   French, P J ^a   Pham, H T M ^a   Sarro, P M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Harsh environments; RH sensors; Temperature effects

Indexed keywords

ATMOSPHERIC HUMIDITY; CHEMICAL SENSORS; ELECTROCHEMISTRY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYSILICON; REDUCTION; SILICON CARBIDE; SINGLE CRYSTALS; THERMAL EFFECTS; THIN FILMS;

HARSH ENVIRONMENTS; RELATIVE HUMIDITY SENSORS;

POROUS SILICON;

EID: 1542361477     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

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