Selective Wet-Etch of Silicon Nitride Passivation Layers

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn , Issue , 1998, Pages 429-434

  Malberti, P ^a   Ciappa, M ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

MECHANICAL MICROPROBING; VOLTAGE CONTRAST;

DRY ETCHING; ELECTRON BEAMS; FAILURE ANALYSIS; LIQUID CRYSTALS; METALLIZING; PASSIVATION; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; VOLTAGE CONTROL;

SILICON NITRIDE;

EID: 1542360770     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

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12. Semicon Etch Technologies, P.O. Box 2631, CH-6051 Bellinzona, Switzerland