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Volumn , Issue , 1999, Pages 311-316

In-situ Dual Beam (FIBSEM) Techniques for Probe Pad Deposition and Dielectric Integrity Inspection in 0.2 μm Technology DRAM Single Cells

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC INTEGRITY INSPECTION; ELECTRON LOCALIZATION; FOCUSED ION BEAM (FIB) SYSTEMS; PROBE PAD DEPOSITION;

EID: 1542348527     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (5)

References (8)
  • 8
    • 1542280301 scopus 로고    scopus 로고
    • DDA Burlington, private communication
    • M. Ruprecht, DDA Burlington, private communication
    • Ruprecht, M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.