Bounds in the sensitivity of BioMEMS devices for cell detection

Biomedical Microdevices

Volumn 6, Issue 1, 2004, Pages 23-31

  Bhalerao, Kaustubh D ^a   Mwenifumbo, Steven C ^b   Soboyejo, Alfred B O ^a   Soboyejo, Winston O ^b  

^a OHIO STATE UNIVERSITY   (United States)

^b Princeton University   (United States)

Author keywords

AFM cantilevers; Bounds; Cell detection; Reliability; Sensitivity; Sensor

Indexed keywords

METAL; SILICON; TITANIUM;

ARTICLE; ATOMIC FORCE MICROSCOPY; BIOMEDICAL TECHNOLOGY ASSESSMENT; BIOTECHNOLOGY; CALCULATION; CANCER CELL CULTURE; CANCER DIAGNOSIS; CELL ADHESION; CELL COUNT; CELL INTERACTION; CELL SPREADING; CONTROLLED STUDY; DEVICE; HUMAN; HUMAN CELL; MECHANICAL PROBE; OSTEOSARCOMA; PREDICTION; PRIORITY JOURNAL; RANDOMIZATION; RELIABILITY; SENSITIVITY ANALYSIS; SENSOR; SIMULATION; THEORETICAL MODEL; VIBRATION;

BIOSENSING TECHNIQUES; CELL ADHESION; CELL COUNT; CELL PHYSIOLOGY; COATED MATERIALS, BIOCOMPATIBLE; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; FLOW CYTOMETRY; HUMANS; MICROSCOPY, ATOMIC FORCE; MODELS, BIOLOGICAL; OSTEOSARCOMA; PHYSICAL STIMULATION; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY; TITANIUM;

EID: 1542346125     PISSN: 13872176     EISSN: None     Source Type: Journal    
DOI: 10.1023/B:BMMD.0000013362.62700.d2     Document Type: Article

References (17)

1. F.M. Battiston and J.-P. Ramseyer, Sensors and Actuators - B Chemical 77, 122 (2001).
2. G. Binning, C.F. Quate, and C. Gerber, Physical Review Letters 56, 930 (1986).
3. E.B. Cooper, E.R. Post, S. Griffith, J. Levitan, S.R. Manalis, M.A. Schmidt, and C.F. Quate, Applied Physics Letters 76(22), 3316 (2000).
4. K.M. Hansen, H.-F. Ji, G. Wu, R. Datar, R. Cote, A. Majumdar, and T. Thundat, Analytical Chemistry 73(7), 1567 (2001).
5. C. Keller, Microfabricated High Aspect Ratio Silicon Flexures: Hexsil, RIE and KOH Etched, Design & Fabrication (MEMS Precision Instruments, 1998), p. 375.
6. G. Kovacs, Micromachined Transducers Sourcebook (McGraw Hill, 1998) p. 375.
7. P. Lu, F. Shen, S.J. O'Shea, K.H. Lee, and T.Y. Ng, Material Physics and Mechanics 4(1), 51 (2001).
8. M. Madou, Fundamentals of Microfabrication: The Science of Miniaturization, 2nd edn (CRC Press, 2002), p. 752.
9. D. Maillefer, S. Gamper, B. Frehner, P. Balmer, H. van Lintel, P. Renaud, IEEE MEMS 2001 (IEEE, Interlaken, 2001), p. 413-417.
10. H.J. Mamin and D. Ruger, Applied Physics Letters 79(20), 3358 (2001).
11. B.M. Paddle, Biosensors and Bioelectronics 11(11), 1079 (1996).
12. R. Raiteri, M. Grattarola, and R. Berger, Materials Today 5(1), 22 (2001).
13. V. Sanguineti et al., Neuro-Engineering: Communications Through Virtual Technology: Identity Community and Technology in the Internet Age, edited by G. Riva and F. Davide (IOS Press, Amsterdam, 2001), p. 233.
14. A.B.O. Soboyejo, K.D. Bhalerao, and W.O. Soboyejo, Mechanical Properties of MEMS Materials, edited by W.O. Soboyejo, R. Ballarini, and S. Allameh, Journal of Materials Science 38, 4163-4167 (2003).
15. Tanner, Bacteriology, 4th edn (John Wiley & Sons, Inc., 1948), p. 78.
16. G. Wu, R.H. Datar, K.M. Hansen, T. Thundat, R.J. Cote, and A. Majumdar, Nature Biotechnology 19(9), 856 (2001).
17. G. Wu, H. Ji, K. Hansen, T. Thundat, R. Datar, R. Cote, M.F. Hagan, A.K. Chakraborty, A. Majumdar, Proceedings of the National Academy of Sciences 98(4), 1560 (2001).