Multidimensional CMOS In-Plane Stress Sensor

Proceedings of IEEE Sensors

Volumn 2, Issue 1, 2003, Pages 242-247

  Bartholomeyczik, J ^a   Ruther, P ^a   Paul, O ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Inplane stress; Junction field effect; Stress sensor; Switching current

Indexed keywords

ELECTRIC CONDUCTIVITY; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; FINITE ELEMENT METHOD; POLYSILICON; SENSORS; STRESSES; SWITCHING;

INPLANE STRESSES; JUNCTION FIELD EFFECT; STRESS SENSORS; SWITCHING CURRENTS;

CMOS INTEGRATED CIRCUITS;

EID: 1542333752     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (17)

1. J.C. Suhling, R.C. Jaeger, IEEE Sensors, Vol. 1, No. 1, (2001), 14.
2. Y. Kanda, IEE Trans. Electron Devices, Vol. ED-29, (1991), 203.
3. Y. Kanda, Sensors and Actuators A, Vol. 28, (1991), 83.
4. J.F. Nye, Physical Properties of Crystals, Oxford Science Publications, (1957).
5. R. Steiner, A. Haeberli, F.-P. Steiner, C. Maier, H. Baltes; Sensors and Actuators A, Vol. 66, (1998), 167.
6. W. Schockley, The theory of p-n junctions in semiconductors and p-n junctions in transistors, Bell Syst. Tech. J., Vol 28, (1949).
7. J.L. Moll, Proc IRE,"The evolution of the theory of the current voltage characteristics of p-n junctions", Vol. 45, (1957).
8. T.J.R. Hughes, The Finite Element Method, Linear Static and Dynamic Finite Element Analysis, Prentice-Hall, (1987).
9. B. Johnson, T. Quarles, A.R. Newton, D.O. Pederson, A. Sangiovanni-Vincentelli, SPICE3 version 3f3 user's manual, Univ. of California, Berkeley, (1993) Available online: http://www-cad.eecs.berkeley.edu/Software/software.html.
10. C. Maier, M. Emmenegger, S. Taschini, H Baltes, J.G. Krovink; IEEE Trans. on Computer-Aided Design of Integrated Circuits and Systems, Vol. 18, (1999), 1000.
11. H.H. Pham, A. Nathan, Sensors Mat., Vol. 10, No.2, (1998). 63-75.
12. H. Shichman, D.A. Hodges, Modeling and simulation of insulated-gate field-effect transistor switching circuits, IEEE J. Solid State Circuits, SC-3, (1968).
13. P. Ruther, U. Schiller, W. Buesser, R. Janke, O. Paul, Proc. Eurosensors XVI, (2002), 1209.
14. M. Metz; Offset in CMOS Magnetotransistors-Analysis and Reduction, Ph.D. Dissertation, ETH-Zurich, No. 13275, (1999).
15. C.S. Smith, Physical Review, Vol. 94(1), (1954), 42-49.
16. U. Schiller, Thermomechanical Offsets in Integrated Hall Plates, Diploma Thesis, IMTEK MML, University of Freiburg, (2001).
17. C.E. Shannon, Proc. IRE, Vol. 37, No. 10, (1949).