Broadband Acoustical Tuning of Nano-Electromechanical Sensors

Proceedings of IEEE Sensors

Volumn 1, Issue 2, 2002, Pages 1285-1289

  Beil, Florian W ^a   Wixforth, Achim ^a   Blick, Robert H ^a  

^a UNIVERSITY OF MUNICH   (Germany)

Author keywords

Dissipation control; Driving mechanisms; Nanomechanical sensors; Surface acoustic wave (SAW)

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; BANDWIDTH; DATA PROCESSING; ELECTROMECHANICAL DEVICES; ELECTROSTATICS; ETCHING; NANOTECHNOLOGY; PHONONS; SENSORS; TRANSDUCERS;

DISSIPATION CONTROL; NANOMECHANICAL SENSORS; SURFACE ACOUSTIC WAVE (SAW) DRIVING MECHANISMS;

RESONATORS;

EID: 1542331393     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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