A pilot plant study using ceramic membrane microfiltration, carbon adsorption and reverse osmosis to treat CMP (chemical mechanical polishing) wastewater

Water Science and Technology: Water Supply

Volumn 4, Issue 1, 2004, Pages 111-118

  Lo, R ^a   Lo, S L ^b  

^a Vivendi Water Syst Taiwan Corp   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Ceramic membrane microfiltration; Chemical mechanical polishing (CMP); Ultra pure water

Indexed keywords

CERAMIC MATERIALS; CHEMICAL MECHANICAL POLISHING; COAGULATION; COSTS; MICROFILTRATION; PH EFFECTS; SEDIMENTATION; SEMICONDUCTOR MATERIALS; WASTEWATER RECLAMATION; WASTEWATER TREATMENT;

CERAMIC MEMBRANES; SEMI-CONDUCTOR PLANTS;

WATER SUPPLY;

ADSORPTION; CERAMIC MEMBRANE; MICROFILTRATION; PILOT PLANT; REVERSE OSMOSIS; WASTEWATER TREATMENT;

ADSORPTION; CALCULATION; CERAMIC MEMBRANE MICROFILTRATION; CONFERENCE PAPER; COST BENEFIT ANALYSIS; ENVIRONMENTAL RECLAMATION; MICROFILTRATION; PH MEASUREMENT; PILOT STUDY; REVERSE OSMOSIS; SCALE UP; SEDIMENTATION; SEMICONDUCTOR; SLUDGE; WASTE WATER MANAGEMENT; WASTE WATER TREATMENT PLANT; WATER SAMPLING;

EID: 1542314338     PISSN: 16069749     EISSN: None     Source Type: Journal    
DOI: 10.2166/ws.2004.0013     Document Type: Conference Paper

References (5)

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5. Yang G.C.C. and Yang T.Y. (2002). A preliminary study on water reclamation from CMP wastewater using a novel treatment module. Journal of the Chinese Institute of Environmental Engineering, 12(3) (in press).