Waveform Acquisition from the Backside of Silicon Using Electro-Optic Probing

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn , Issue , 1999, Pages 19-25

  Bruce, Mike ^a   Dabney, Greg ^a   McBride, Shawn ^a   Mulig, Jason ^a   Bruce, Victoria ^a   Bachand, Charles ^a   Kasapi, Steven ^b   Block, Jeffrey A ^b  

^a ADVANCED MICRO DEVICES   (United States)

^b SCHLUMBERGER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRO-OPTIC PROBING; LASER SCANNING MICROSCOPE (LSM);

ABSORPTION; ELECTRIC FIELDS; ELECTRIC SPACE CHARGE; ELECTROOPTICAL EFFECTS; GRAPHICAL USER INTERFACES; LASER APPLICATIONS; LASER MODE LOCKING; MICROPROCESSOR CHIPS; REFRACTIVE INDEX; SILICON; SPURIOUS SIGNAL NOISE; WAVEFORM ANALYSIS;

FLIP CHIP DEVICES;

EID: 1542300955     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

1. M. Paniccia, E. Eiles, V.R.M. Rao, and W.M. Yee, "Novel optical probing technique for flip chip packaged microprocessors," Proceedings of the 1998 International Test Conference, p. 740 (1998).
2. B.R. Hemenway, H.K. Heinrich, J.H. Goll, Z. Xu, and David M. Bloom, "Optical Detection of Charge Modulation in Silicon Integrated Circuits Using a Multimode Laser-Diode Probe", IEEE Electronic Device Lett. EDL-8, 346 (1987).
3. H.K. Heinrich and D.M. Bloom, Method and means for optical detection of charge density modulations in a semiconductor, United States Patent 4,758,092. Stanford University (1988).
4. H.K. Heinrich, D.S. Kent, and L.M. Cropp, "Backside Optical Measurements of Picosecond Internal Gate Delays in a Flip-Chip Packaged Silicon VLSI Circui," IEEE Photonics Techn. Lett. 3, 673 (1991).
5. H.K. Heinrich, N. Pakdaman, J.L. Prince, D.S. Kent, L.M. Cropp, "Picosecond Backside Optical Detection of Internal Signals In Flip-Chip Mounted Silicon VLSI Circuits," Microelectronic Engineering 16, 313 (1992).
6. G.N. Koskowich. Voltage measurement in silicon and gallium-arsenide technologies using optical phase modulation, Dissertation, University of Washington (1988).
7. G.N. Koskowich and M. Soma, "Optical Charge Modulation as an Internal Voltage Probe for CMOS IC's" IEEE J. of Quantum Electronics 24, 1981 (1988).
8. L.V. Keldysh, "The effect of a strong electric field on the optical properties of insulating crystals," Soviet Physics JETP 34, 788 (1958).
9. R.A. Soref and B.R. Bennett, "Electrooptical Effects in Silicon," IEEE J. of Quantum Electronics QE-23, 123 (1987).
10. M. Paniccia, R.M. Rao, and W.M. Yee, "Optical Probing of flip chip packaged microprocessors," J. Vac. Sci. Technol. B 16, 3625 (1998).