A high-sensitivity piezoresistive gyroscope with torsional actuation and axially-stressed detection

Proceedings of IEEE Sensors

Volumn 2, Issue 1, 2003, Pages 457-460

  Song, Zhaohui ^a   Chen, Xuemeng ^a   Huang, Shusen ^a   Wang, Yuelin ^a   Jiao, Jiwei ^a   Li, Xinxin ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION; COMPUTER SIMULATION; ELASTIC MODULI; ELECTROSTATICS; MICROMACHINING; NATURAL FREQUENCIES; PIEZOELECTRICITY; SENSITIVITY ANALYSIS; SENSORS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; TORSIONAL STRESS;

PIEZORESISTIVE GYROSCOPES; TORSIONAL ACTUATION;

GYROSCOPES;

EID: 1542273547     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. M. Bao, "Micro mechanical transducers-pressure sensors, accelerometers and gyroscopescopes", Handbook of Sensors and Actuator, Edited by S. Middelhoek, Vol.8, Elsevier, 2000.
2. Xinxin Li, Minhang Bao, Heng Yang, Shaoqun Shen, Deren Lu. A micromachined piezoresistive angular rate sensor with a composite beam structure. Sensors and Actuators, A72, 1999, pp.217-223.
3. M. Lim, H. Du,C.Su, W.Jin, "A micromachined piezoresistive accelerometer with high sensitivity :design and modeling", Microelectronic Engineering 49(1999) 263-272.
4. Shusen Huang , Xinxin Li, "A piezoresistive accelerometer with axially stressed tiny beams for both much increased sensitivity and much broadened frequency bandwidth", Transducer '03