Thin films of in2O3/SiO for humidity sensing applications

Sensors

Volumn 2, Issue 6, 2002, Pages 205-218

  Arshak, K ^a   Twomey, K ^a  

^a UNIVERSITY OF LIMERICK   (Ireland)

Author keywords

AC conduction; DC conduction; Humidity sensitivity; Temperature sensitivity; Thin film sensor

Indexed keywords

ATMOSPHERIC HUMIDITY; ELECTRIC CONDUCTANCE; INDIUM COMPOUNDS; PYROLYSIS; SCANNING ELECTRON MICROSCOPY; TEMPERATURE MEASUREMENT; THIN FILMS; VACUUM;

AC CONDUCTION; DC CONDUCTION; HUMIDITY SENSITIVITY; TEMPERATURE SENSITIVITY; THIN FILMS SENSORS;

CHEMICAL SENSORS;

EID: 1542269543     PISSN: 14243210     EISSN: None     Source Type: Journal    
DOI: 10.3390/s20600205     Document Type: Article

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