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Volumn 358, Issue 1-4, 2005, Pages 56-62
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Insights into microstructural evolution and polycrystalline compounds formation from Pd-Ge thin films
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Author keywords
Amorphous; Annealing; Microstructure; Polycrystalline
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Indexed keywords
ANNEALING;
CRYSTALLIZATION;
GALLIUM;
GRAIN SIZE AND SHAPE;
INTEGRATED CIRCUITS;
KINEMATICS;
MICROSTRUCTURE;
NUCLEATION;
PALLADIUM COMPOUNDS;
THERMAL EFFECTS;
THIN FILMS;
TRANSMISSION ELECTRON MICROSCOPY;
AMORPHOUS;
MICROMECHANICAL DEVICES;
POLYCRYSTALLINE THIN FILMS;
THICKNESS RATIO;
POLYCRYSTALLINE MATERIALS;
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EID: 15344343446
PISSN: 09214526
EISSN: None
Source Type: Journal
DOI: 10.1016/j.physb.2004.12.026 Document Type: Article |
Times cited : (7)
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References (17)
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