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Volumn 7, Issue 1, 2005, Pages 353-356
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Characterization of heat- and photo- annealed GeXas 40-XS60 films by X-ray photoelectron spectroscopy
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Author keywords
Amorphous film; Heat annealing; Photo annealing; X ray photoelectron spectroscopy (XPS)
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Indexed keywords
ANNEALING;
ANTIMONY COMPOUNDS;
BINDING ENERGY;
BONDING;
CHARACTERIZATION;
GERMANIUM COMPOUNDS;
SILICON;
X RAY PHOTOELECTRON SPECTROSCOPY;
CHEMICAL BONDING STRUCTURE;
HEAT ANNEALING;
LOOSER FILM STRUCTURE;
PHOTO ANNEALING;
PHOTOSENSITIVE GLASS;
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EID: 15244342439
PISSN: 14544164
EISSN: None
Source Type: Journal
DOI: None Document Type: Conference Paper |
Times cited : (5)
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References (10)
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