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Volumn 325, Issue 1-3, 2003, Pages 142-149
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Mechanical stress studies of amorphous GexSb 40-xS60 film
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
GERMANIUM COMPOUNDS;
GLASS;
PHASE SEPARATION;
STRESS ANALYSIS;
INTRINSIC STRESS;
AMORPHOUS FILMS;
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EID: 0043029871
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-3093(03)00265-5 Document Type: Article |
Times cited : (16)
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References (24)
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