Electrocapillary force actuation of microfluidic elements

Microelectronic Engineering

Volumn 78-79, Issue 1-4, 2005, Pages 93-99

  Berre, M Le ^a   Chen, Y ^a,b   Crozatier, C ^a   Zhang, Z L ^a  

^a ECOLE NORMALE SUPÉRIEURE   (France)

^b CNRS   (France)

Author keywords

Electrocapillary force; Membrane actuation; Micro valves; Microfluidics

Indexed keywords

CAPILLARITY; DEFORMATION; DROP FORMATION; FORCE MEASUREMENT; MEMBRANES; MERCURY (METAL); MICROELECTRODES; VALVES (MECHANICAL);

ELECTROCAPILLARY FORCE; MEMBRANE ACTUATION; MICRO VALVES; MICROFLUIDICS;

FLUIDICS;

EID: 14944373605     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2004.12.014     Document Type: Conference Paper

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