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Volumn 11, Issue 6, 2004, Pages 515-519
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Low-temperature growth and photoluminescence of SiCN nanoparticle film by consecutive RF magnetron sputtering
a
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Author keywords
Low temperature growth; Photoluminescence; RF magnetron sputtering; SiCN
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Indexed keywords
FILM GROWTH;
MAGNETRON SPUTTERING;
MORPHOLOGY;
NANOSTRUCTURED MATERIALS;
PHOTOLUMINESCENCE;
STRUCTURAL ANALYSIS;
THIN FILMS;
X RAY DIFFRACTION ANALYSIS;
DIFFRACTION INTENSITY;
LOW-TEMPERATURE GROWTH;
NANOPARTICLE FILMS;
PHOTO EXCITATION;
SILICON CARBIDE;
BUFFER;
SILICON DERIVATIVE;
ARTICLE;
EXCITATION;
FILM;
GROWTH;
HIGH TEMPERATURE PROCEDURES;
LOW TEMPERATURE PROCEDURES;
METHODOLOGY;
MORPHOLOGY;
NANOPARTICLE;
PHOTOLUMINESCENCE;
RF MAGNETRON SPUTTERING;
ROOM TEMPERATURE;
X RAY DIFFRACTION;
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EID: 14844348441
PISSN: 0218625X
EISSN: None
Source Type: Journal
DOI: 10.1142/S0218625X04006566 Document Type: Article |
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Times cited : (3)
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References (12)
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